Browse Prior Art Database

Air Track

IP.com Disclosure Number: IPCOM000088045D
Original Publication Date: 1977-Apr-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 2 page(s) / 53K

Publishing Venue

IBM

Related People

Perls, E: AUTHOR [+2]

Abstract

Shown is an air track section which can route a semiconductor wafer (or other workpieces) in a path at a work station, such as the furnace whose outline is shown. The track section can comprise a lateral offshoot or spur of a main track line from which a wafer can be removed and returned.

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Air Track

Shown is an air track section which can route a semiconductor wafer (or other workpieces) in a path at a work station, such as the furnace whose outline is shown. The track section can comprise a lateral offshoot or spur of a main track line from which a wafer can be removed and returned.

The path illustratively comprises a U-shaped circuit having directional jets for moving wafers to the far end, as indicated by the in path arrows. Positioned at the far end of the track section are laterally directed air jets, as indicated by the transfer path arrows, to move the wafer to the return path, as indicated by the like named arrows, for return to the main track line by oppositely directed air jets.

Wafers are maintained on the path by opposed rows of inwardly directed centering air jets. Wafers can be indexed along the path of the track section by means of vacuum ports which can stop the workpiece at predetermined substations where they can be centered by means of a series of four or more air jets which are inwardly directed to the center point of the substation.

Transfer paths can be provided between adjacent substations.

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