Browse Prior Art Database

Ink Jet Nozzles

IP.com Disclosure Number: IPCOM000088310D
Original Publication Date: 1977-May-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 2 page(s) / 48K

Publishing Venue

IBM

Related People

Chiou, C: AUTHOR [+3]

Abstract

Ink jet nozzle plates may be formed having a hard, inert membrane. A way of fabricating such a nozzle plate is illustrated in the figures.

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Ink Jet Nozzles

Ink jet nozzle plates may be formed having a hard, inert membrane. A way of fabricating such a nozzle plate is illustrated in the figures.

In Fig. 1, SiO(2) layers 10 and 11 are formed on a crystalline silicon substrate 12 and registration holes 13 and 14 are preferentially etched.

In Fig. 2, the front SiO(2) layer 10 is removed and a permalloy or other metal layer 15 is evaporated thereon to serve as a plating base. A photoresist 16 of several layers is applied and developed to form the nozzle patterns 17.

As shown by Fig. 3, gold is electroplated onto the permalloy in the nozzle pattern holes to form studs 18. The photoresist is then stripped and the unprotected permalloy plating base is sputter-etched.

Fig. 4 illustrates the sputtering of a membrane layer 19 using the gold studs as the mask. The membrane material on top of the gold studs is removed and photoresist layer 20 applied to the reverse side and developed to obtain nozzle aperture patterns 21. The registration marks 13 and 14 are important in assuring alignment of the gold studs 18 with the aperture patterns 21.

In Fig. 5, the SiO(2) layer 11 is etched, the photoresist stripped, and the Si substrate 12 preferentially etched to form apertures 22.

As shown in Fig. 6, the gold and permalloy studs are dissolved in acid to obtain the nozzle orifices 23 in the membrane layer 19. The membrane material is then sputter-deposited in the apertures to form a protective layer 24.

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