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Corrosion Rate Sensor to Monitor Film Topography Effects

IP.com Disclosure Number: IPCOM000088317D
Original Publication Date: 1977-May-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 2 page(s) / 29K

Publishing Venue

IBM

Related People

Eldridge, JM: AUTHOR [+2]

Abstract

A corrosion rate sensor adapted to monitor film topography effects is shown in the drawing. A piezoelectric quartz crystal substrate 10 has a counter electrode 12 of gold on one side. On the other side of the substrate 10 is a thin film of metal 14 having a series of rings 16 therein. The rings 16 are obtained by etching through a photoresist ring pattern. This test structure enables one to assess topography influence of stress-induced corrosion.

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Corrosion Rate Sensor to Monitor Film Topography Effects

A corrosion rate sensor adapted to monitor film topography effects is shown in the drawing. A piezoelectric quartz crystal substrate 10 has a counter electrode 12 of gold on one side. On the other side of the substrate 10 is a thin film of metal 14 having a series of rings 16 therein. The rings 16 are obtained by etching through a photoresist ring pattern. This test structure enables one to assess topography influence of stress-induced corrosion.

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