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Fixture for Precisely Holding Substrates

IP.com Disclosure Number: IPCOM000088435D
Original Publication Date: 1977-Jun-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 2 page(s) / 42K

Publishing Venue

IBM

Related People

Feurer, MJ: AUTHOR

Abstract

In the fabrication of substrates for semiconductor packages the substrate must be located and supported in a precise alignment both vertically and in the X-Y plane. Such operations are typically testing, rework, engineering changes, and the like. Frequently the substrates are of different sizes and thicknesses. A fixture which can conveniently and quickly be adapted for holding the various sizes of substrates is desirable.

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Fixture for Precisely Holding Substrates

In the fabrication of substrates for semiconductor packages the substrate must be located and supported in a precise alignment both vertically and in the X-Y plane. Such operations are typically testing, rework, engineering changes, and the like. Frequently the substrates are of different sizes and thicknesses. A fixture which can conveniently and quickly be adapted for holding the various sizes of substrates is desirable.

This fixture includes a locator element 10 (Fig. 1), which is permanently mounted on the testing apparatus or other apparatus where the need for supporting a substrate exists, and a removable pallet 12. The locator element 10 has a pair of opposed slidably mounted jaws 14 adapted to engage the opposite corners of a substrate 20. Each jaws is provided with a contacting element 16 which engages the substrate at a single point. A suitable mechanism in the base of the locator element moves the jaws 14 into and out of contacting engagement. The actuating means for jaws 14 can be an air cylinder 18 or some other suitable actuating mechanism.

The pallet 12 (Fig. 2) has a series of shallow grooves 22 in the top surface that are connected to an aperture 24 that terminates on the base of hub 26 (Fig. 3, bottom view). A seal 28 of a flexible material is provided on the top surface around the periphery of pallet 12 which in operation engages the bottom periphery of substrate 20. In operation a source of vacuum draws...