Browse Prior Art Database

Fluidic Oscillating Control System

IP.com Disclosure Number: IPCOM000088439D
Original Publication Date: 1977-Jun-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 2 page(s) / 37K

Publishing Venue

IBM

Related People

Meeks, AE: AUTHOR

Abstract

This article describes a fluidic logic circuit which can be readily adapted to control movement of semiconductor wafers on air slides, such as shown in U. S. Patent 3,890 508.

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Fluidic Oscillating Control System

This article describes a fluidic logic circuit which can be readily adapted to control movement of semiconductor wafers on air slides, such as shown in U. S. Patent 3,890 508.

In the drawing, the application of line air (solid arrow) to a work device, such as an orientor (see above noted U. S. patent), is regulated by a high pressure fluid logic supply valve 1 in response to an appropriate signal on fluid line 2 provided at 01 output of fluidic flip-flop B whose sensitivity is controlled by a needle valve (NV) 3. The output of flip-flop B is determined by the switching flip- flop A whose sensitivity is determined by needle valve 4. The operating pressure for flip-flop A is defined by needle valves/air capacitor assemblies 5 and 6 at respective sides of the flip-flop A.

The high pressure output from valve 1 is reduced by needle valves 7 and/or 8 to the required operating pressures of the working devices, as exemplified by air slide orientors and/or associated chucks.

Substitution of a vacuum fluidic valve for the high pressure valve 1 enables control vacuum application (broken arrow) for corresponding vacuum-operated tools.

The auxiliary output 02 of flip-flop B can be employed to operate an additional high pressure valve, such as 1, or, conversely, a vacuum valve.

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