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Analytical Determination of Fe in Thin SiO(2) Layers on Si Wafers by Atomic Absorption Spectroscopy

IP.com Disclosure Number: IPCOM000088461D
Original Publication Date: 1977-Jun-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Briska, M: AUTHOR

Abstract

First, the SiO(2) on the wafer edge is removed by subjecting a stack of oxidized wafers to an HF atmosphere for 8 to 10 minutes. Then one wafer in a horizontal position is placed in a bowl, and about 10 Mu1 of a concentrated HF solution are dropped onto the center of the wafer. Then the bowl is immediately covered. After 2 minutes the SiO(2) has dissolved completely in the HF, which is collected with an Eppendorf pipette and then, with 10 Mu1 of rinsing water, introduced into a graphite furnace. The sample is finally dried at 100 Degrees C for 40 seconds, ashed at 230 Degrees C and 1100 Degrees C for 20 and 40 seconds, respectively, and then analyzed in the atomic absorption spectrometer while heating to 2000-2800 Degrees C for 20 seconds.

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Analytical Determination of Fe in Thin SiO(2) Layers on Si Wafers by Atomic Absorption Spectroscopy

First, the SiO(2) on the wafer edge is removed by subjecting a stack of oxidized wafers to an HF atmosphere for 8 to 10 minutes. Then one wafer in a horizontal position is placed in a bowl, and about 10 Mu1 of a concentrated HF solution are dropped onto the center of the wafer. Then the bowl is immediately covered. After 2 minutes the SiO(2) has dissolved completely in the HF, which is collected with an Eppendorf pipette and then, with 10 Mu1 of rinsing water, introduced into a graphite furnace. The sample is finally dried at 100 Degrees C for 40 seconds, ashed at 230 Degrees C and 1100 Degrees C for 20 and 40 seconds, respectively, and then analyzed in the atomic absorption spectrometer while heating to 2000-2800 Degrees C for 20 seconds. The absorption signal is recorded and graphically evaluated by comparison with standards of between 0.2 and 20 ng total Fe content.

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