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Micromechanical Light Deflector Array

IP.com Disclosure Number: IPCOM000088523D
Original Publication Date: 1977-Jun-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 2 page(s) / 42K

Publishing Venue

IBM

Related People

Petersen, KE: AUTHOR

Abstract

A micromechanical light deflector array is shown in the top view of Fig. 1 and the cross-sectional view of Fig. 2. The array consists of a plurality of thin-film electrodes 12 positioned on a thin layer 14 of SiO(2). The metal film 12 and the oxide layer 14 form a metal-coated oxide membrane. One end of the metal-coated oxide membrane is supported by the top surface of the silicon wafer 16. The other end of the metalcoated oxide membrane is positioned above a shallow rectangular well 18 which had been etched in the silicon wafer. Electrode 20 is in contact with the metal-coated membrane. Electrode 22 is connected to silicon wafer 16 through the metal layer 24.

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Micromechanical Light Deflector Array

A micromechanical light deflector array is shown in the top view of Fig. 1 and the cross-sectional view of Fig. 2. The array consists of a plurality of thin-film electrodes 12 positioned on a thin layer 14 of SiO(2). The metal film 12 and the oxide layer 14 form a metal-coated oxide membrane. One end of the metal- coated oxide membrane is supported by the top surface of the silicon wafer 16. The other end of the metalcoated oxide membrane is positioned above a shallow rectangular well 18 which had been etched in the silicon wafer. Electrode 20 is in contact with the metal-coated membrane. Electrode 22 is connected to silicon wafer 16 through the metal layer 24.

By applying a voltage V between the silicon 16 through electrode 22 and through electrode 20 to any one of the membranes, a downward deflection of the membrane (shown in dotted lines in Fig. 2) will occur due to the electrostatic attraction between the silicon and the metal on the membrane.

If a long, narrow line of light 26 is simultaneously incident on all of the membranes in the deflector array, the reflected line of light can be modulated point by point. This modulation is done by separately controlling the deflection of each membrane and positioning an optical aperture 28 external to the array which permits only reflected light 30, for example, off the undeflected membranes to pass therethrough. Reflected light 32 off the deflected membranes would not pass through...