Browse Prior Art Database

Superclean Flat Workpiece Transport

IP.com Disclosure Number: IPCOM000088656D
Original Publication Date: 1977-Jul-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Stoehr, RR: AUTHOR

Abstract

Certain flat workpieces, for example, those required for the manufacture of electronic circuit elements, must be handled and transported in a clean or superclean air environment. Transportation from one process station to another is currently carried out with the aid of a clean air slide. Air used for this purpose still contains minute particles or impurities which cannot be removed by state-of-the-art filtering methods.

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 1

Superclean Flat Workpiece Transport

Certain flat workpieces, for example, those required for the manufacture of electronic circuit elements, must be handled and transported in a clean or superclean air environment. Transportation from one process station to another is currently carried out with the aid of a clean air slide. Air used for this purpose still contains minute particles or impurities which cannot be removed by state-of- the-art filtering methods.

To overcome this disadvantage, the cleaned air for the slide is replaced by gas evaporated from a fluid, such as FREON* or a similar gas, having a relatively low boiling point. * Trademark of E. I. du Pont de Nemours & Co.

1