Browse Prior Art Database

Chevron Sputtering Catcher

IP.com Disclosure Number: IPCOM000088718D
Original Publication Date: 1977-Jul-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 2 page(s) / 27K

Publishing Venue

IBM

Related People

Kennedy, TN: AUTHOR

Abstract

A catcher 1 is shown in Fig. 1 mounted above the sputtering electrode 2 in a sputter vacuum deposition system 3. The catcher 1 is chevron-shaped to provide a high density captor for sputtered material to prevent contamination of the substrates with material atoms reflected from the chamber walls and the substrate holder. The plates of the chevron-shaped catcher 1 force the free atoms to contact multiple surfaces where they may deposit before assuming a direction towards the substrate during an etching operation.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Chevron Sputtering Catcher

A catcher 1 is shown in Fig. 1 mounted above the sputtering electrode 2 in a sputter vacuum deposition system 3. The catcher 1 is chevron-shaped to provide a high density captor for sputtered material to prevent contamination of the substrates with material atoms reflected from the chamber walls and the substrate holder. The plates of the chevron-shaped catcher 1 force the free atoms to contact multiple surfaces where they may deposit before assuming a direction towards the substrate during an etching operation.

The catcher 1 may have its chevron-shaped plates formed in a spiral format or in a multiple of ever-expanding circles or with a plurality of straight line plates fastened to the top of the sputtering chamber. Several contemplated designs for the catcher plates using the chevron shape are shown in Fig. 2. Two, three, four or more angled plates can be used. The more plates employed in the chevron, the better the chances of contamination prevention of the substrate since the stray particle has a better opportunity for depositing on the catcher.

1

Page 2 of 2

2

[This page contains 1 picture or other non-text object]