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Fabrication of Cermet Resistors

IP.com Disclosure Number: IPCOM000088819D
Original Publication Date: 1977-Aug-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 2 page(s) / 48K

Publishing Venue

IBM

Related People

Memis, I: AUTHOR [+2]

Abstract

Cermet resistors can be fabricated on a metallized ceramic substrate utilizing only two photoprocess steps. The procedure for accomplishing this is as follows:. 1. Metallize the ceramic substrate with a blanket of cermet/ chrome/copper/chrome, as shown in Fig. 1. 2. Apply, expose and develop a pattern of photoresist, as shown in Fig. 2. 3. Etch the chrome/copper/chrome, and strip the photoresist. Use an etchant which does not attack the cermet. 4. Reapply, expose and develop the photoresist, as shown in Fig. 3. In this case, the photoresist covers the cermet resistor and the circuit lines, but it does not cover the lands. 5. Etch the chrome. This step will remove the chrome from the pin pads, thereby exposing the copper for tinning. 6. Etch the background cermet, and strip the resist.

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Fabrication of Cermet Resistors

Cermet resistors can be fabricated on a metallized ceramic substrate utilizing only two photoprocess steps. The procedure for accomplishing this is as follows:. 1. Metallize the ceramic substrate with a blanket of cermet/ chrome/copper/chrome, as shown in Fig. 1. 2. Apply, expose and develop a pattern of photoresist, as shown in Fig. 2. 3. Etch the chrome/copper/chrome, and strip the photoresist. Use an etchant which does not attack the cermet. 4. Reapply, expose and develop the photoresist, as shown in Fig. 3. In this case, the photoresist covers the cermet resistor and the circuit lines, but it does not cover the lands. 5. Etch the chrome. This step will remove the chrome from the pin pads, thereby exposing the copper for tinning. 6. Etch the background cermet, and strip the resist. This step will define the cermet resistor between the two conductors.

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