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Substrate Location Detection and Error Compensation

IP.com Disclosure Number: IPCOM000088904D
Original Publication Date: 1977-Aug-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 2 page(s) / 42K

Publishing Venue

IBM

Related People

Firdaus, A: AUTHOR [+3]

Abstract

The mapping data is generated by clamping the part with locators and referencing all location data with respect to the locators. Tools which don't have the locator and clamping mechanism similar to the mapping tool cannot use the mapping data available for the part as they cannot duplicate the part location on the tool. The present arrangement will locate the part without clamping, and generate X, Y and Theta error compensation parameters to correct the mapping data for the location of the part on the tool.

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Substrate Location Detection and Error Compensation

The mapping data is generated by clamping the part with locators and referencing all location data with respect to the locators. Tools which don't have the locator and clamping mechanism similar to the mapping tool cannot use the mapping data available for the part as they cannot duplicate the part location on the tool. The present arrangement will locate the part without clamping, and generate X, Y and Theta error compensation parameters to correct the mapping data for the location of the part on the tool. The technique uses optical alignment of certain features of the part with respect to the tool parameters and a mathematical model to generate the optical alignment data to extract correction factors for mapping data update for X, Y and Theta variations of the part location on the tool compared to the way the data was taken.

The above is accomplished as follows: a. A location site on the part, for example, AO1, is optically aligned to a reticle on TV. The position of the X, Y location of the part is read by the system. b. The part is indexed to a further location site, for example, KO1, and realigned optically, and the new position read. c. The data gathered at the location sites AO1 and KO1 is used to compute the exact location of the part on the tool. d. Once this is accomplished, the mapping data is corrected for the difference in the position of the part on the tool compared to the way the part was located...