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Sputtering Cathode Glow Suppression Shields

IP.com Disclosure Number: IPCOM000088943D
Original Publication Date: 1977-Aug-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 2 page(s) / 49K

Publishing Venue

IBM

Related People

Lester, WC: AUTHOR [+2]

Abstract

Shields are normally placed around the cathode/target in a sputtering system to reduce the rim effect that results in an excess of material being removed from the edge of the target. The edge glows during sputtering as a result of the ion bombardment concentration. The cathode/target is generally placed at an electrical potential and must be insulated from the chamber walls and supporting structures.

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Sputtering Cathode Glow Suppression Shields

Shields are normally placed around the cathode/target in a sputtering system to reduce the rim effect that results in an excess of material being removed from the edge of the target. The edge glows during sputtering as a result of the ion bombardment concentration. The cathode/target is generally placed at an electrical potential and must be insulated from the chamber walls and supporting structures.

In Fig. 1 a cathode 1 is shown with an attached target 2 that is made from the material to be sputtered. The cathode/target is connected to a support structure 3 through a cathode insulating block 4. A cathode shield 5 is attached to the support structure 3 and extends over the cathode/target assembly. An optical baffle section 6 is either attached to or made a part of the cathode shield 5 to prevent stray sputtered material from covering the insulating block 4 and causing an electrical short between the normally grounded structure 3 and the electrical potential applied to the cathode 1 and target 2. The optical baffle 6 is placed perpendicular to the cathode shield 5 and parallel to the cathode/target side wall to force the stray sputtered species to take a tortuous path before depositing onto the insulator block 4.

In Fig. 2, another cathode shield 7 is shown fabricated of the same material as that used for target 2. The cathode shield 7 is electrically isolated from the supporting structure 3 by insulator 8 and insulator...