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An Accel Structure for an Ion Implanter Extractor

IP.com Disclosure Number: IPCOM000089045D
Original Publication Date: 1977-Sep-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 2 page(s) / 60K

Publishing Venue

IBM

Related People

Hicks, WW: AUTHOR [+2]

Abstract

In ion implantation machines, isotope separators and other ion electron devices, it is often desirable to have a beam of small size and high current. In the extractor member of the implantation machine which extracts and shapes the beam emitted from the source, the opening in the accel plate may be a slit especially when high current is desired. With such a slit accel plate, the mechanism for obtaining high beam intensity, brightness, in the direction perpendicular to the slit has been extensively investigated. However, very little has been done in obtaining the best beam brightness or intensity in the direction parallel to the slit. The present structure provides an accel plate design which optimizes the beam brightness or intensity in the direction parallel to the slit.

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An Accel Structure for an Ion Implanter Extractor

In ion implantation machines, isotope separators and other ion electron devices, it is often desirable to have a beam of small size and high current. In the extractor member of the implantation machine which extracts and shapes the beam emitted from the source, the opening in the accel plate may be a slit especially when high current is desired. With such a slit accel plate, the mechanism for obtaining high beam intensity, brightness, in the direction perpendicular to the slit has been extensively investigated. However, very little has been done in obtaining the best beam brightness or intensity in the direction parallel to the slit. The present structure provides an accel plate design which optimizes the beam brightness or intensity in the direction parallel to the slit.

The present accel plate structure will be better understood with reference to Fig. 1, which is a cross-section in the long dimension of the accel plate aperture slit, showing the source exit plate 10 with aperture 11 therein from which beam 12 exits the source, the extractor unit 13 comprising accel plate 14 with slit 15 therein and decel plate 16 with aperture 17 therein. Fig. 1A shows the same structure in cross-section perpendicular to the cross-section of Fig. 1, i.e., in the narrow dimension of the accel plate slit 15. For best results, the accel plate 14 should have a surface shape in the direction facing the oncoming beam which is flat 19' or perpendicular to the desired beam ray direction over the length of the beam 12 and has a "Pierce Shape" [*] 19 or some fraction thereof, on both sides adjacent to the long dimension of the slit facing the oncoming beam. This fraction decreases, for constant extracted current, when the di...