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Automated Punch Apparatus for Forming Via Holes in a Ceramic Green Sheet

IP.com Disclosure Number: IPCOM000089051D
Original Publication Date: 1977-Sep-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 2 page(s) / 33K

Publishing Venue

IBM

Related People

Cochran, TJ: AUTHOR [+2]

Abstract

In the manufacture of multilayer ceramic (MLC) substrates for integrated-circuit semiconductor package structures, a plurality of ceramic green sheets must be punched to form via holes, metallizing paste deposited in the holes and in appropriate patterns on the surface of the sheet, the sheet stacked, and subsequently fired at a sintering temperature. The holes are conventionally formed with a punch. In a typical MLC product ceramic sheets can have thousands of holes each with a diameter as small as 0.05 inch. This apparatus, which is designed to punch holes in a ceramic green sheet, can form holes in any desired pattern in response to a suitable control.

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Automated Punch Apparatus for Forming Via Holes in a Ceramic Green Sheet

In the manufacture of multilayer ceramic (MLC) substrates for integrated- circuit semiconductor package structures, a plurality of ceramic green sheets must be punched to form via holes, metallizing paste deposited in the holes and in appropriate patterns on the surface of the sheet, the sheet stacked, and subsequently fired at a sintering temperature. The holes are conventionally formed with a punch. In a typical MLC product ceramic sheets can have thousands of holes each with a diameter as small as 0.05 inch. This apparatus, which is designed to punch holes in a ceramic green sheet, can form holes in any desired pattern in response to a suitable control.

Apparatus 10 (Fig. 1) has a plurality of individually activated programmable punching elements supported in punch head 12. Head 12 is supported by a suitable means which provides movement in a vertical direction relative to green sheet 14 supported on movable table 16. Associated with head 12 is a retract plate 18 which is spring-biased outwardly from the head 12, and has a plurality of holes through which punch elements 20 project (Fig. 2). Base 22 is provided with an actuating means adapted to move the table 16 in the X and Y directions. The movement of the table 16 and the individual actuation of each of the punching elements 20 are controlled by computer control 24, shown schematically in Fig. 1.

Fig. 2 illustrates the actuating device for the individual punching elements 20. A solenoid-driving device is provided which is sufficiently small to permit close spacing of the punch elements.

The solenoid has a push coil 26 and a pull coil 28 which act on magnet 30 slidabl...