Browse Prior Art Database

Mask Cleaning Technique Using Concentric Tubes and Air Bearing

IP.com Disclosure Number: IPCOM000089058D
Original Publication Date: 1977-Sep-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 2 page(s) / 36K

Publishing Venue

IBM

Related People

Balder, WB: AUTHOR [+4]

Abstract

A semiconductor circuit printing mask 1 or other surface is cleaned of contamination particles by device 2, which includes an inner vacuum tube 3 and an outer tube 4 which is connected to a source of high pressure air or nitrogen. A gap is maintained between mask 1 and device 2 without contacting mask 1 by the use of an air bearing 5. The gas from nozzle 6 of outer tube 4 frees any contamination particles which are then removed through vacuum nozzle 7 of tube 3.

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Mask Cleaning Technique Using Concentric Tubes and Air Bearing

A semiconductor circuit printing mask 1 or other surface is cleaned of contamination particles by device 2, which includes an inner vacuum tube 3 and an outer tube 4 which is connected to a source of high pressure air or nitrogen. A gap is maintained between mask 1 and device 2 without contacting mask 1 by the use of an air bearing 5. The gas from nozzle 6 of outer tube 4 frees any contamination particles which are then removed through vacuum nozzle 7 of tube
3.

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