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Preventing Arcing in High Voltage Equipment

IP.com Disclosure Number: IPCOM000089067D
Original Publication Date: 1977-Sep-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 2 page(s) / 49K

Publishing Venue

IBM

Related People

Bugbee, RI: AUTHOR [+3]

Abstract

During the operation of any high voltage equipment, such as ion implantation equipment, there is a great tendency toward arcing. In ion implantation equipment, for example, this arcing occurs between the source apparatus and the first electrode which is conventionally the accel/decel electrode. However, arcing may also occur between the corona box and any area at lower potentials, e.g., frames or any other components at earth ground. The present apparatus expedients serve to control the return current of such arcing.

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Preventing Arcing in High Voltage Equipment

During the operation of any high voltage equipment, such as ion implantation equipment, there is a great tendency toward arcing. In ion implantation equipment, for example, this arcing occurs between the source apparatus and the first electrode which is conventionally the accel/decel electrode. However, arcing may also occur between the corona box and any area at lower potentials, e.g., frames or any other components at earth ground. The present apparatus expedients serve to control the return current of such arcing.

For example, as shown in Fig. 1, the high units should be enclosed in the standard corona box (not shown) which, in turn, is enclosed in a ground box insulated from the frame ground system. This contains any arcs or related surge current to the isolated area. The structure also provides means to cause the charge buildup on the corona to uniformly distribute and, thereby, reduce the chance of any arc conditions developing. Further, as illustrated in Fig. 2, all other sources or components which are capable of developing a high capacitance charge to high voltage equipment are connected to a common ground point. This brings all ground return paths for arc currents to a single common point and, thereby, contains the currents which are a source of damage to a defined path and area. The common ground point is then connected to the frame, i.e., earth ground, via a low resistance, slightly higher conductance path....