Browse Prior Art Database

Method of Reliably Opening Fusible Links

IP.com Disclosure Number: IPCOM000089115D
Original Publication Date: 1977-Sep-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Hinderer, A: AUTHOR [+3]

Abstract

It is known to apply current pulses, via fusible links of a conductive pattern on semiconductor integrated circuits, for opening the fusible links in order to eliminate unreliable circuits or to activate redundant circuits. When a polyimide layer is provided over the aluminum conductive pattern for passivation, the fuse blowing effects bubble formation in the polyimide layer, with traces of aluminum left in the channel and bubbles of said layer. This causes corrosion problems in the integrated circuits.

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 1

Method of Reliably Opening Fusible Links

It is known to apply current pulses, via fusible links of a conductive pattern on semiconductor integrated circuits, for opening the fusible links in order to eliminate unreliable circuits or to activate redundant circuits. When a polyimide layer is provided over the aluminum conductive pattern for passivation, the fuse blowing effects bubble formation in the polyimide layer, with traces of aluminum left in the channel and bubbles of said layer. This causes corrosion problems in the integrated circuits.

One way to overcome these problems is to convert the aluminum at the fusible link into nonconductive oxide by means of an oxidant available there. The conversion of the metal is performed at temperatures higher than those of the following process steps. In the fuse-blowing process neither bases, ion nor any other conductive matter should appear, and the reaction has to stop of it own accord.

In a preferred embodiment peroxides, e.g., barium peroxide, are admixed to the polyamic acid prior to the coating of the conductive pattern.

During heating the following reaction takes place at the fused links:

2A1 3BaO(2) ----> A1(2)O(3) 3BaO.

1