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Determination of the Adsorption/Desorption Properties of Solid Surfaces by Simultaneous EIID/AES Measurements

IP.com Disclosure Number: IPCOM000089121D
Original Publication Date: 1977-Sep-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Kaus, G: AUTHOR [+2]

Abstract

The known disadvantages of the separate application of EIID (Electron Induced Ion Desorption) and AES (Auger Electron Spectroscopy) are eliminated by the simultaneous use of both methods for examining the same spot of a solid material sample. The results of the analyses give a very complete picture of the adsorption/desorption properties of said spot.

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Determination of the Adsorption/Desorption Properties of Solid Surfaces by Simultaneous EIID/AES Measurements

The known disadvantages of the separate application of EIID (Electron Induced Ion Desorption) and AES (Auger Electron Spectroscopy) are eliminated by the simultaneous use of both methods for examining the same spot of a solid material sample. The results of the analyses give a very complete picture of the adsorption/desorption properties of said spot.

Merely a primary electron beam causing both the desorption and ionization of the adsorbed surface particles and the Auger electron emission is used to excite the sample surface. The electron-induced ion desorption is measured by a quadrupole mass analyzer, and the emitted Auger electrons are simultaneously detected by a cylindrical mirror analyzer. The electron gun, the two analyzers and the sample are positioned within a UHV chamber. The primary electron beam forms a 30 degree angle with the sample surface.

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