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Repair Technique for Eliminating Discontinuities in Patterned Metallurgy

IP.com Disclosure Number: IPCOM000089169D
Original Publication Date: 1977-Sep-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Hammer, R: AUTHOR

Abstract

A severe problem which causes poor yield in large metallization patterns is that of discontinuities in the metal lines. This problem is particularly severe in matrix-type displays, i.e., gas panels, etc., where a single defective line can cause hundreds of points to be unaddressable.

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Repair Technique for Eliminating Discontinuities in Patterned Metallurgy

A severe problem which causes poor yield in large metallization patterns is that of discontinuities in the metal lines.

This problem is particularly severe in matrix-type displays, i.e., gas panels, etc., where a single defective line can cause hundreds of points to be unaddressable.

Several schemes have been proposed to repair such defects. In one, E- beam deposition (by evaporation of a thin wire) is used to deposit a small spot of metal in the defect area. The amount of metal deposited would be, to some extent, governed by wire size.

In the following scheme sputtering is used to deposit metallurgy over the line defect through a simple slit mask. Defects in metal lines in the gas panel program are, typically, only a few mils in length. Metal or graphite masks with slits of comparable length and -/> 2 mils in width (depending on line width of metallurgy to be repaired) are easily fabricated by electro-discharge-machining or other suitable techniques. The masks are positionable over defect areas by the use of optical alignment equipment, as is currently used for registering optical masks. Intimate mask-to-substrate contact during sputter deposition can be obtained by an electrostatic hold-down technique.

Metal depositions have been obtained by sputtering through masks held electrostatically in standard sputter gun configurations in large commercially available vacuum systems 16 inches in dia...