Browse Prior Art Database

Peripheral Vacuum Stop for Pneumatic Orienter

IP.com Disclosure Number: IPCOM000089255D
Original Publication Date: 1977-Oct-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 2 page(s) / 35K

Publishing Venue

IBM

Related People

Lifshey, IH: AUTHOR

Abstract

Fig. 1 shows a conventional stop on a pneumatic orientor (driving jets not shown) employing centrally located vacuum grooves to stop a semiconductor wafer as it is rotating to an orientated position. With this vacuum stop configuration, it is difficult to reliably orient a wafer with better than +/- 0.010-inch accuracy.

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Peripheral Vacuum Stop for Pneumatic Orienter

Fig. 1 shows a conventional stop on a pneumatic orientor (driving jets not shown) employing centrally located vacuum grooves to stop a semiconductor wafer as it is rotating to an orientated position. With this vacuum stop configuration, it is difficult to reliably orient a wafer with better than +/- 0.010-inch accuracy.

Improved accuracy and repeatability with reliability on the order of +/- 0.003 inch can be obtained with a peripheral vacuum groove having the configuration shown in Fig. 2.

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