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Low Coercivity Amorphous Magnetic Alloy Film

IP.com Disclosure Number: IPCOM000089371D
Original Publication Date: 1977-Oct-01
Included in the Prior Art Database: 2005-Mar-04
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Heiman, ND: AUTHOR [+3]

Abstract

An amorphous metal-metalloid alloy can be produced in thin-film form with high 4 Pi M and low coercivity by varying composition and deposition parameters. A minimum coercivity can be obtained without the need for annealing by properly selecting the composition of the alloy and the sputter gas pressure of a sputter-deposition system.

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Low Coercivity Amorphous Magnetic Alloy Film

An amorphous metal-metalloid alloy can be produced in thin-film form with high 4 Pi M and low coercivity by varying composition and deposition parameters. A minimum coercivity can be obtained without the need for annealing by properly selecting the composition of the alloy and the sputter gas pressure of a sputter-deposition system.

Conventional diode sputtering techniques were used to deposit films from a target having a composition of 75 atomic percentage iron and 25 atomic percentage carbon. An argon pressure of 15 microns was used to achieve films containing 70 atomic percentage iron and 30 atomic percentage carbon. The films produced have a 4 Pi M of 12,000 gauss and a coercivity in the range 0.1 Oe. to 0.9 Oe. Films deposited at higher and lower argon pressure had significantly higher coercivity.

Films of a nominal composition of 75 atomic percentage iron and 25 atomic percentage carbon were deposited by dual-source magnetron sputter-deposition techniques. Films having a coercivity of less than 1.0 Oe were obtained at a 3- micron argon pressure or less. A larger coercivity was observed for higher pressure.

The films produced were amorphous. Passivation to further enhance corrosion resistance can be accomplished by the addition of a significantly smaller amount of the passivating elements, such as chromium or noble metals. Films were deposited using these techniques of composition 74 atomic percentage iron, 6 atom...