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Use of Preferential Nucleation to Form Stripes or Other Film Configurations without the Use of Photoresist or Mask

IP.com Disclosure Number: IPCOM000089393D
Original Publication Date: 1977-Oct-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

LaPlaca, SJ: AUTHOR [+3]

Abstract

The nucleation of deposits of face-centered cubic metals on insulating substrates (e.g., NaCl, KCl, mica, SiO(2)) can be promoted in a number of different ways. The nucleation of gold on KCl, for example, is promoted by: a) exposure of the KCl surface to air; b) electron irradiation of the KCl surface; c) irradiation of the crystal with X-rays; and d) the presence of color centers formed by interdiffusion or ion implantation. One of the consequences of enhanced nucleation is the formation of a continuous, i.e., hole free, film at an early stage in deposit growth. One commonly observed result of the early coalescence associated with enhanced nucleation and early film formation is a change in the texture or orientation of the deposit.

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Use of Preferential Nucleation to Form Stripes or Other Film Configurations without the Use of Photoresist or Mask

The nucleation of deposits of face-centered cubic metals on insulating substrates (e.g., NaCl, KCl, mica, SiO(2)) can be promoted in a number of different ways. The nucleation of gold on KCl, for example, is promoted by: a) exposure of the KCl surface to air; b) electron irradiation of the KCl surface; c) irradiation of the crystal with X-rays; and d) the presence of color centers formed by interdiffusion or ion implantation. One of the consequences of enhanced nucleation is the formation of a continuous, i.e., hole free, film at an early stage in deposit growth. One commonly observed result of the early coalescence associated with enhanced nucleation and early film formation is a change in the texture or orientation of the deposit. For example, if gold is deposited in ultra high vacuum onto pure NaCl cleaved in vacuum, the film obtained has a (111) texture and is polycrystalline. On the other hand, if the NaCl surface is exposed to air, or irradiated with electrons or X-rays, before the deposition of gold is begun, then the films obtained are single crystals oriented with (001) parallel to the (001) cleavage face of NaCl.

A second consequence of early coalescence is that electrical continuity (parallel to the film plane) is achieved at an early stage in film growth. The purpose of this article is to point out the following:

Irradiation of a portion of an alkali halide surface with a focussed beam of electrons prior to metal...