Browse Prior Art Database

Fluted Pistons or Piston Walls for Semiconductor Chip Cooling

IP.com Disclosure Number: IPCOM000089499D
Original Publication Date: 1977-Nov-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 37K

Publishing Venue

IBM

Related People

Hasson, JC: AUTHOR [+3]

Abstract

A piston-like heat conductor is useful in the removal of generated heat from a semiconductor chip device. The heat conductive piston is forced against the side of the semiconductor device usually by spring action. A thermally conductive gas, for example, a helium-air mixture, is present between the piston and the chip to complete the thermal path between the chip and the piston.

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Fluted Pistons or Piston Walls for Semiconductor Chip Cooling

A piston-like heat conductor is useful in the removal of generated heat from a semiconductor chip device. The heat conductive piston is forced against the side of the semiconductor device usually by spring action. A thermally conductive gas, for example, a helium-air mixture, is present between the piston and the chip to complete the thermal path between the chip and the piston.

Air trapped behind pistons, because of close tolerances required for good thermal performance, causes the end of life for the air-helium mixture to be reached much sooner, thus shortening the life of the cooling structure. A flute or groove 3, for example, .030'' x .030'', down the side of each piston 4 with crown 5 (Fig. 1) would facilitate the removal of the trapped air by providing a high conductance path for air to flow along during the pumpdown cycle prior to filling with helium.

Alternatively, milled slots 6 (Fig. 2), about 1/8'' longer than the pistons and
.03'' wide, connecting adjacent piston chambers, would facilitate the removal of any trapped air since each piston chamber 7 would have a high conductance path to the chip side of the piston. The connections between the piston chambers could, alternatively, be formed by drilling perpendicularly to the piston chamber walls and horizontally connecting ten piston chambers at a time. This, however, would require resealing each of the ten drill holes in one outside wall. Co...