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Simultaneous Ion Induced AES SIMS Method for the Chemical Analysis of Solid Surfaces

IP.com Disclosure Number: IPCOM000089748D
Original Publication Date: 1977-Dec-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Kaus, G: AUTHOR [+2]

Abstract

A surface spot of a sample positioned in a UHV chamber is radiated with an ion beam, causing the emission of secondary ions and Auger electrons which are simultaneously analyzed.

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Simultaneous Ion Induced AES SIMS Method for the Chemical Analysis of Solid Surfaces

A surface spot of a sample positioned in a UHV chamber is radiated with an ion beam, causing the emission of secondary ions and Auger electrons which are simultaneously analyzed.

The ion-induced AES (Auger Electron Spectroscopy)-SIMS (Secondary Ion Mass Spectroscopy) method, by the defined selection of the type of primary ions and their energies, permits the selective excitation of different elements and the accurate control of the depth of the surface layer in which excitation occurs. As a result of the ion excitation, light elements can be made to emit new Auger lines which do not coincide with the lines of other elements. The simultaneous method is also useful for determining the mechanisms which cause the formation of secondary ions and Auger electrons.

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