Browse Prior Art Database

Support Frame for Graphite Vacuum Deposition Masks

IP.com Disclosure Number: IPCOM000089824D
Original Publication Date: 1977-Dec-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 47K

Publishing Venue

IBM

Related People

Hammer, R: AUTHOR

Abstract

This article describes a device which provides a rigid support to a fragile flexible mask, without interfering with the deposition or placing any stress or weight on the mask.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 53% of the total text.

Page 1 of 2

Support Frame for Graphite Vacuum Deposition Masks

This article describes a device which provides a rigid support to a fragile flexible mask, without interfering with the deposition or placing any stress or weight on the mask.

Past usage of vacuum deposition masks has in general been limited to relatively small and simple pattern configurations due to fabrication problems. For example, completely connected patterns surrounding a region could not be fabricated without leaving a free-standing island. Closely related to this "stencil" problem are difficulties in fabricating masks with thin cantilever sections supported at only one end or long and narrow closely-spaced parallel slots.

The advent of rib-supported mask structures has greatly eliminated these difficulties and thin graphite sheets are now being fabricated with these difficult patterns [*]. Moreover, previous size limitations due to the inherent weakness of these masks has been eliminated by the support rib structures so that very large masks (5''x12'') are now being fabricated. However, handling of these masks during mounting inspection, cleaning and drying, etc., presents problems.

Usage of these masks without a supporting frame has resulted in damage, on occasion, during these operations. As these masks are made still larger and this problem becomes more acute, support frames become more essential. In providing a support frame for these masks a prime concern is that the frame must allow the mask to lie in contact with the substrate while at the same time the weight of the relatively heavy frame should not be supported by the fragil...