Browse Prior Art Database

Use of Nonpolymeric Organic Compounds

IP.com Disclosure Number: IPCOM000089914D
Original Publication Date: 1968-Dec-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Kaplan, LH: AUTHOR

Abstract

A refractory metal is deposited on substrate in a predetermined pattern by vapor deposition, using a hydrocarbon compound as a maskant. The hydrocarbon compound, e.g., paraffin, is coated onto a substrate in a predetermined pattern by spinning a dilute solution of the hydrocarbon over a diazo-type photoresist pattern. The photoresist is exposed to actinic radiation and developed, leaving a hydrocarbon pattern. A refractory metal, e.g., Mo, W, etc., is then deposited by the decomposition of the carbonyl compound of the metal at a temperature between 200 degrees C and 240 degrees C. The metal is deposited at the exposed areas of the substrate according to the hydrocarbon pattern.

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Use of Nonpolymeric Organic Compounds

A refractory metal is deposited on substrate in a predetermined pattern by vapor deposition, using a hydrocarbon compound as a maskant. The hydrocarbon compound, e.g., paraffin, is coated onto a substrate in a predetermined pattern by spinning a dilute solution of the hydrocarbon over a diazo-type photoresist pattern. The photoresist is exposed to actinic radiation and developed, leaving a hydrocarbon pattern. A refractory metal, e.g., Mo, W, etc., is then deposited by the decomposition of the carbonyl compound of the metal at a temperature between 200 degrees C and 240 degrees C. The metal is deposited at the exposed areas of the substrate according to the hydrocarbon pattern.

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