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Browse Prior Art Database

Monitor for Sputtering Apparatus

IP.com Disclosure Number: IPCOM000089952D
Original Publication Date: 1968-Dec-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 29K

Publishing Venue

IBM

Related People

Lounsbury, JB: AUTHOR

Abstract

This monitoring device utilizes argon ion emission intensity to measure the amount of RF power actually used to sustain the glow discharge. One method of measuring RF power is with an external meter between the power source and the apparatus. However, this arrangement has the disadvantage that total power is monitored which include losses due to heat, radiation, etc. The intensities of four argon ion lines, 4726.91 angstroms, 4732.08 angstroms, 4735.93 angstroms, 4764.89 angstroms, emitted by the glow are proportional to the RF power while sputtering SiO(2) with pure Argon and with 99% Argon - 1% O(2). In this device, the use of argon ion emission intensity is used as a measure of RF power sustaining a glow discharge in pure argon and argon containing admixtures of other gasses such as used for sputtering.

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Monitor for Sputtering Apparatus

This monitoring device utilizes argon ion emission intensity to measure the amount of RF power actually used to sustain the glow discharge. One method of measuring RF power is with an external meter between the power source and the apparatus. However, this arrangement has the disadvantage that total power is monitored which include losses due to heat, radiation, etc. The intensities of four argon ion lines, 4726.91 angstroms, 4732.08 angstroms, 4735.93 angstroms, 4764.89 angstroms, emitted by the glow are proportional to the RF power while sputtering SiO(2) with pure Argon and with 99% Argon - 1% O(2). In this device, the use of argon ion emission intensity is used as a measure of RF power sustaining a glow discharge in pure argon and argon containing admixtures of other gasses such as used for sputtering. The monitoring device has transparent window 10 in the enclosure of the sputtering apparatus positioned adjacent the glow discharge. Lens 12 focuses the radiation from the glow discharge through wavelength selector 14 into an optical detector 16. Selector 14 is a spectrometer or a filter tuned to select the desired argon ion lines. Detector 16 is a phototube, photodiode, photomultiplier or similar device. The output from detector 16 is displayed on output 18 which can be a meter, oscilloscope, strip chart, or other output device. Alternately, the output of the monitor can be utilized to control the RF power source.

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