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Attaching Small Concentrations of Photodecomposable Crosslinking Agents in Positive Photoresists

IP.com Disclosure Number: IPCOM000090056D
Original Publication Date: 1969-Jan-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 32K

Publishing Venue

IBM

Related People

Levy, MF: AUTHOR [+2]

Abstract

The effectiveness of a positive resist is measured by its ability to amplify small changes in its chemical make-up. A desirable system entails the incorporation of one crosslinking agent per pair of polymer chains. Photolytic dissociation of the agent leads to halving of the molecular weight by removal of the crosslink. These changes facilitate solubilization of the polymer.

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Attaching Small Concentrations of Photodecomposable Crosslinking Agents in Positive Photoresists

The effectiveness of a positive resist is measured by its ability to amplify small changes in its chemical make-up. A desirable system entails the incorporation of one crosslinking agent per pair of polymer chains. Photolytic dissociation of the agent leads to halving of the molecular weight by removal of the crosslink. These changes facilitate solubilization of the polymer.

The principle of the reaction is to polymerize a polymer onto an initiator molecule which is potentially photosensitive. The photosensitivity is realized by reaction with a species which creates a crosslink which may be photolytically cleaved. After the polymerization is stopped at a predetermined molecular weight, the intermediate on two polymer chains are joined together by the crosslinking agent. There can be one agent per pair of polymer chains or one for every four.

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