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Passivation of Molybdenum Metallurgy by In Situ Formation of Carbide Overlayers

IP.com Disclosure Number: IPCOM000090230D
Original Publication Date: 1969-Mar-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Kaplan, LH: AUTHOR

Abstract

The reactivity of molybdenum Mo with water at 85 degrees C is a major problem in the development of high-current metallurgies. The passivation of Mo films to overcome this water reactivity problem can be obtained by the deposition of a molybdenum carbide film, e.g., MoC or Mo(2)C, on the Mo films. A Mo coated substrate is disposed in a vapor deposition apparatus heated to a temperature of 300 degrees C or less. Molybdenum hexacarbonyl is passed over this Mo film and is decomposed, thus depositing a thin film of MoC or Mo(2)C on the Mo film.

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Passivation of Molybdenum Metallurgy by In Situ Formation of Carbide Overlayers

The reactivity of molybdenum Mo with water at 85 degrees C is a major problem in the development of high-current metallurgies. The passivation of Mo films to overcome this water reactivity problem can be obtained by the deposition of a molybdenum carbide film, e.g., MoC or Mo(2)C, on the Mo films. A Mo coated substrate is disposed in a vapor deposition apparatus heated to a temperature of 300 degrees C or less. Molybdenum hexacarbonyl is passed over this Mo film and is decomposed, thus depositing a thin film of MoC or Mo(2)C on the Mo film.

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