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Continuous Vacuum Deposition Source

IP.com Disclosure Number: IPCOM000090316D
Original Publication Date: 1969-Mar-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 38K

Publishing Venue

IBM

Related People

Menz, W: AUTHOR

Abstract

The wire-shaped material to be vaporized is fed to source 1 which is heated inductively or by electron bombardment. Motor 3 and the optical sense system on the right are provided for controlling the height of the meniscus edge 2. Light and particle beams emitted by source 1 are separated by two slotted disks 4 and 5 rotating on a common axis. The different velocities of photons and particles permit the light to reach lens 6. The slower particles not passing the open slot in rotating disk 5 are shaded off. Lens 6 parallels the light beam impinging upon beam splitter prism 7. The position of meniscus edge 2 causes the light beam to be apportioned to the two output beams passing lenses 8 and 9 and measured in detectors 10 and 11.

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Continuous Vacuum Deposition Source

The wire-shaped material to be vaporized is fed to source 1 which is heated inductively or by electron bombardment. Motor 3 and the optical sense system on the right are provided for controlling the height of the meniscus edge 2. Light and particle beams emitted by source 1 are separated by two slotted disks 4 and 5 rotating on a common axis. The different velocities of photons and particles permit the light to reach lens 6. The slower particles not passing the open slot in rotating disk 5 are shaded off. Lens 6 parallels the light beam impinging upon beam splitter prism 7. The position of meniscus edge 2 causes the light beam to be apportioned to the two output beams passing lenses 8 and 9 and measured in detectors 10 and 11. The sense signals of these detectors are fed into differential amplifier 12 controlling servomotor 3 for readjusting meniscus edge 2. The sense system including lens 6 can be attached to the vacuum deposition chamber from the outside via a window.

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