Browse Prior Art Database

Clamping Fixture

IP.com Disclosure Number: IPCOM000090420D
Original Publication Date: 1969-Apr-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 46K

Publishing Venue

IBM

Related People

Bresg, V: AUTHOR

Abstract

In this clamping fixture for semiconductor wafers, support 1 is formed with recess 2 defined within angulated walls 3. Mounted in recess 2 is reverse-acting spring 4 secured to force rod 5 and normally sprung to nest in the corner within walls 3. Rod 5 can be slidably mounted in a bore 6 in the substrate in which it is normally biased to the lock position by spring 4. Alternately, rod 5 can be threadedly mounted in bore 6 and rotated between the lock and unlock positions. To seat a wafer 7, rod 5 is driven into the Phantomed unlock position 5A and wafer 7 is inserted into recess 2 beneath spring 4. Rod 5 is returned to the original lock position. To remove the wafer, the process is reversed.

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Clamping Fixture

In this clamping fixture for semiconductor wafers, support 1 is formed with recess 2 defined within angulated walls 3. Mounted in recess 2 is reverse-acting spring 4 secured to force rod 5 and normally sprung to nest in the corner within walls 3. Rod 5 can be slidably mounted in a bore 6 in the substrate in which it is normally biased to the lock position by spring 4. Alternately, rod 5 can be threadedly mounted in bore 6 and rotated between the lock and unlock positions. To seat a wafer 7, rod 5 is driven into the Phantomed unlock position 5A and wafer 7 is inserted into recess 2 beneath spring 4. Rod 5 is returned to the original lock position. To remove the wafer, the process is reversed.

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