Browse Prior Art Database

Automatic Wafer Testing System

IP.com Disclosure Number: IPCOM000090421D
Original Publication Date: 1969-Apr-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 49K

Publishing Venue

IBM

Related People

McCabe, JF: AUTHOR [+3]

Abstract

The positioning system is for presenting wafers 1 in a work position at, for example, probes of a test system for resistivity measurements. Wafers 1 are handled in sets of four in trays 2 which, in turn, are stacked and held in magazine 3. Magazine retention frame 4 coacts with a tray positioner, not shown, to lower the tray stack, one tray at a time to position tray 2A for removal from magazine 3. An interlocking arrangement, comprised of disk-ended rod 5 and openings 6 in trays 2 effects removal of such trays from magazine 3. After tray 2A is in proper position on extension of rod 5, tray 2A is removed out from magazine 3 against positioning stops 7 and 8 on a turntable 9. Then rod 5 is rotated 90 degrees and retracted from engagement with tray 2A.

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Automatic Wafer Testing System

The positioning system is for presenting wafers 1 in a work position at, for example, probes of a test system for resistivity measurements. Wafers 1 are handled in sets of four in trays 2 which, in turn, are stacked and held in magazine
3. Magazine retention frame 4 coacts with a tray positioner, not shown, to lower the tray stack, one tray at a time to position tray 2A for removal from magazine 3. An interlocking arrangement, comprised of disk-ended rod 5 and openings 6 in trays 2 effects removal of such trays from magazine 3. After tray 2A is in proper position on extension of rod 5, tray 2A is removed out from magazine 3 against positioning stops 7 and 8 on a turntable 9. Then rod 5 is rotated 90 degrees and retracted from engagement with tray 2A. Turntable 9 is then rotatably indexed to sequentially position each wafer 1 at the work position. After positioning of all four wafers, rod 5 is again extended into position and rotated for engagement in recess 6 of carrier 2A for retraction of it into magazine 3. The stack of trays 2 is lowered to position the next successive tray for removal onto turntable 9.

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