Browse Prior Art Database

Step Tablet

IP.com Disclosure Number: IPCOM000090523D
Original Publication Date: 1969-May-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 28K

Publishing Venue

IBM

Related People

Lussow, RO: AUTHOR [+2]

Abstract

The step tablet is for accurately determining the proper exposure for photoresists. In addition to the usual inclusion of a series of steps 1 on a transparent film of progressively increasing optical densities, the step tablet incorporates resolution target 2 into each step strip. The pattern of the resolution target can be clear or opaque for negative or positive resists as required. In operation, an exposure is made by passing light from a source through the step tablet onto a photoresist layer. In effect, the graduated density strips vary the effective exposure on different parts of the photoresist to provide an indication of the minimum exposure required to produce a continuous film.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Step Tablet

The step tablet is for accurately determining the proper exposure for photoresists. In addition to the usual inclusion of a series of steps 1 on a transparent film of progressively increasing optical densities, the step tablet incorporates resolution target 2 into each step strip. The pattern of the resolution target can be clear or opaque for negative or positive resists as required. In operation, an exposure is made by passing light from a source through the step tablet onto a photoresist layer. In effect, the graduated density strips vary the effective exposure on different parts of the photoresist to provide an indication of the minimum exposure required to produce a continuous film. The incorporation of target 2 enables the determination of the maximum exposure permissible which does not affect the dimensional integrity of the transferred pattern.

1

Page 2 of 2

2

[This page contains 1 picture or other non-text object]