Browse Prior Art Database

Diffusion Boat

IP.com Disclosure Number: IPCOM000090538D
Original Publication Date: 1969-May-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 36K

Publishing Venue

IBM

Related People

DeFries, RM: AUTHOR

Abstract

These horizontal boats are for semiconductor wafer diffusions. The boat in drawing A includes spaced sets of posts 1...4 of material such as quartz and the like mounted in holder 5 which can also be formed of quartz, silicon, or the like. In operation, semiconductor wafers 6 are stacked one on top of each other between posts 1...4 and supported on holder 5. This type of boat can be used in a high C(O) diffusion. Drawing B shows an arrangement of the boat employing ribs and ridges on posts 7...9 coacting with common ribbed clamp post 10 for spacing and locking wafers 6 in place. This type of boat is used for a low C(O) diffusion.

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Diffusion Boat

These horizontal boats are for semiconductor wafer diffusions. The boat in drawing A includes spaced sets of posts 1...4 of material such as quartz and the like mounted in holder 5 which can also be formed of quartz, silicon, or the like. In operation, semiconductor wafers 6 are stacked one on top of each other between posts 1...4 and supported on holder 5. This type of boat can be used in a high C(O) diffusion. Drawing B shows an arrangement of the boat employing ribs and ridges on posts 7...9 coacting with common ribbed clamp post 10 for spacing and locking wafers 6 in place. This type of boat is used for a low C(O) diffusion.

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