Browse Prior Art Database

Wafer Carrier

IP.com Disclosure Number: IPCOM000090539D
Original Publication Date: 1969-May-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 55K

Publishing Venue

IBM

Related People

DeFries, RM: AUTHOR

Abstract

The carrier is for processing semiconductor wafers in open-tube diffusion operations. It has the capability of handling wafers of different diameters and in large quantities. In drawing A, the carrier includes base plate 1 of material such as quartz, formed with extended shaft 2 provided with a quick, bayonet disconnect 3. Secured on plate 1 are wafer mounting sets including slotted canes 4 and racks 5 formed of quartz and the like. Semiconductor wafers 6 are arranged in side-by-side relationship in rows 7 by insertion in slots 8 of canes 4. These position the wafers vertically so that wafer notches 12 abut rail 5. The optional mounting of baffles 9 and 10 on shaft 2 assist in the distribution of processing gas flow across the wafer matrix mounted on the carrier.

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Wafer Carrier

The carrier is for processing semiconductor wafers in open-tube diffusion operations. It has the capability of handling wafers of different diameters and in large quantities. In drawing A, the carrier includes base plate 1 of material such as quartz, formed with extended shaft 2 provided with a quick, bayonet disconnect 3. Secured on plate 1 are wafer mounting sets including slotted canes 4 and racks 5 formed of quartz and the like. Semiconductor wafers 6 are arranged in side-by-side relationship in rows 7 by insertion in slots 8 of canes 4. These position the wafers vertically so that wafer notches 12 abut rail 5. The optional mounting of baffles 9 and 10 on shaft 2 assist in the distribution of processing gas flow across the wafer matrix mounted on the carrier. In an alternate mounting, baffles 9 and 10 can be positioned on the push rod to allow quick disconnect 3 to be fixed to the boat. Drawing B shows a carrier for a transfer operation between a process furnace tube and transport carrier 11.

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