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Browse Prior Art Database

Automatic Thin Film Pinhole Detector

IP.com Disclosure Number: IPCOM000090739D
Original Publication Date: 1969-Jun-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 44K

Publishing Venue

IBM

Related People

Rottmann, HR: AUTHOR

Abstract

The apparatus provides an automated system for pinhole detection in which chrome photomasking plate 1 is moved in the X direction under a row of light pipes 2 extending in the Y direction. Thin rectangular area 8, extending in the Y direction, is illuminated by dark field illuminator 3. The row of light pipes 2 is placed above plate 1 off the axis of the illuminating light beams. Any light which is transmitted through plate 1 through an area larger than a pinhole, no defect, bypasses the entrance ports of the light pipes. A pinhole, defect, on the other hand, diffracts much of the transmitted light in the direction of the light pipe adjacent to the pinhole. Exit ports 4 of light pipes 2 are arranged in circular fashion and are scanned by rotary slit 5.

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Automatic Thin Film Pinhole Detector

The apparatus provides an automated system for pinhole detection in which chrome photomasking plate 1 is moved in the X direction under a row of light pipes 2 extending in the Y direction. Thin rectangular area 8, extending in the Y direction, is illuminated by dark field illuminator 3. The row of light pipes 2 is placed above plate 1 off the axis of the illuminating light beams. Any light which is transmitted through plate 1 through an area larger than a pinhole, no defect, bypasses the entrance ports of the light pipes. A pinhole, defect, on the other hand, diffracts much of the transmitted light in the direction of the light pipe adjacent to the pinhole. Exit ports 4 of light pipes 2 are arranged in circular fashion and are scanned by rotary slit 5. Light emerging from any of ports 4 is directed via lens 6 to photosensitive detector 7. The drives for the chrome plate and for the slit scanner can be provided with encoders for the determination of the coordinates of each detected pinhole. Rapid pinhole inspection is achieved by virtue of the scanning operation which is performed simultaneously in the X and Y directions.

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