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Measuring the Adhesion of Thin Metal Films to Substrates

IP.com Disclosure Number: IPCOM000090974D
Original Publication Date: 1969-Sep-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Krongelb, S: AUTHOR

Abstract

The adhesion of thin metal films to nonconductive substrates is measured by magnetic and electric field techniques. In the magnetic field technique, a substrate having disposed on it a thin metal film line is established in a magnetic field of the order of 100,000 gauss. An electric current is passed through the metal film line at right angles to the magnetic field. As a result of this passage of current, a force is applied to the thin film which tends to pull it from the surface of the substrate. This force can be calculated from a knowledge of the current and the magnetic field strength.

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Measuring the Adhesion of Thin Metal Films to Substrates

The adhesion of thin metal films to nonconductive substrates is measured by magnetic and electric field techniques. In the magnetic field technique, a substrate having disposed on it a thin metal film line is established in a magnetic field of the order of 100,000 gauss. An electric current is passed through the metal film line at right angles to the magnetic field. As a result of this passage of current, a force is applied to the thin film which tends to pull it from the surface of the substrate. This force can be calculated from a knowledge of the current and the magnetic field strength.

Where a current of 1 ampere is applied to a structure measuring 10 mu, a force of 140 psi is applied to the film. To limit heating of the sample, the current can be in the form of pulses and larger currents can be used to create proportionately larger stresses. For example, a 50 ampere pulse can produce stresses of the order of 7000 psi.

An alternate method of applying a force to a thin film is to use the film as one plate of a capacitor. The second electrode of the capacitor is rigidly fixed a distance from the film. An application of a voltage between the two electrodes produces a force which tends to pull the film from the substrate with a stress dependent on the voltage and spacing. For a spacing between the two conductors of 20 mu and a voltage of 10/4/ mu, a stress of 10/2/ Newtons/cm/2/, 140 psi, is produced. This...