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Wide Temperature Range Substrate Holder

IP.com Disclosure Number: IPCOM000091124D
Original Publication Date: 1969-Nov-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 44K

Publishing Venue

IBM

Related People

Sawatzky, E: AUTHOR [+2]

Abstract

The substrate temperature during film deposition both in sputtering and evaporation must be well controlled. The actual temperature required varies with the material being prepared. Commercial systems provide substrate holders with fluid channels which are adequate for operation at moderate temperatures, but usually cannot operate at very low or very high temperatures. It is preferred not to have to change holders to cover different temperature ranges.

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Wide Temperature Range Substrate Holder

The substrate temperature during film deposition both in sputtering and evaporation must be well controlled. The actual temperature required varies with the material being prepared. Commercial systems provide substrate holders with fluid channels which are adequate for operation at moderate temperatures, but usually cannot operate at very low or very high temperatures. It is preferred not to have to change holders to cover different temperature ranges.

This substrate holder can maintain substrates at any temperatures between liquid nitrogen -196 degrees and about +750 degrees C. The structure incorporates alumina insulator 1 with a continuous channel 2 connecting two holes on opposite sides of the circular alumina structure. The holes and channel are large enough to accommodate heating element 3 insulated from the metal parts and to leave enough room for sufficient gas or liquid to pass for cooling purposes.

Heater 3 is a corrugated nichrome ribbon. It is held in position by the alumina insert and restrained from contacting the copper top by thin alumina rods 4. Top platform 5 is made of copper because of its high conductivity. Lead-in wires 6 are of oxidation resistant material with relatively high electrical conductivity. The remainder of the structure is made of stainless steel. The joints are closed either by heliarc welding or high-temperature brazing. Wires 6 are insulated by ceramic beads 7. Cooling fluid is brought...