Browse Prior Art Database

Vacuum Feedthrough Apparatus

IP.com Disclosure Number: IPCOM000091314D
Original Publication Date: 1968-Jan-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 47K

Publishing Venue

IBM

Related People

Lin, C: AUTHOR

Abstract

For feeding continuous film 1 from a higher pressure area 2 to vacuum chamber 3 and back to area 2, such film is fed across roller 4 through narrow slot 5 and across roller 6. Slot 5 is formed between two juxtaposed members 7 and 8 including roughing stations 9 and 10, 11, and 12 connected to vacuum pumps 13 and 14, respectively, to limit the airflow to chamber 3.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Vacuum Feedthrough Apparatus

For feeding continuous film 1 from a higher pressure area 2 to vacuum chamber 3 and back to area 2, such film is fed across roller 4 through narrow slot 5 and across roller 6. Slot 5 is formed between two juxtaposed members 7 and 8 including roughing stations 9 and 10, 11, and 12 connected to vacuum pumps 13 and 14, respectively, to limit the airflow to chamber 3.

1

Page 2 of 2

2

[This page contains 2 pictures or other non-text objects]