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Fabricating Inverted Magnetic Films

IP.com Disclosure Number: IPCOM000091508D
Original Publication Date: 1968-Mar-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Ahn, KY: AUTHOR

Abstract

This method produces inverted permalloy films. An inverted film is one in which the H(c)/H(k) ratio is less than one. The degree of inversion can be controlled by the substrate temperature, the thickness of an underlayer, and by the material used for the underlayer. For a range of substrate temperatures from 100 degrees C to 300 degrees C, inverted films with an H(c)/H(k) ratio of up to 10 can be produced by evaporating gold, copper, silver, or aluminum films in the thickness range from 100 Angstroms to about 20,000 Angstroms on an underlayer prior to evaporation of permalloy. The interfilm stress and the surface roughness caused by the metal underlayer are considered factors which produce the changes in inversion.

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Fabricating Inverted Magnetic Films

This method produces inverted permalloy films. An inverted film is one in which the H(c)/H(k) ratio is less than one. The degree of inversion can be controlled by the substrate temperature, the thickness of an underlayer, and by the material used for the underlayer. For a range of substrate temperatures from 100 degrees C to 300 degrees C, inverted films with an H(c)/H(k) ratio of up to 10 can be produced by evaporating gold, copper, silver, or aluminum films in the thickness range from 100 Angstroms to about 20,000 Angstroms on an underlayer prior to evaporation of permalloy. The interfilm stress and the surface roughness caused by the metal underlayer are considered factors which produce the changes in inversion.

Ordinary thin magnetic films, termed normal films, which are vacuum evaporated using the fabrication parameters of Table 1, have the characteristics as shown in Table 2.

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In contrast to normal films, inverted films have H(k) values lower than H(c) and hence are termed inverted. These films are fabricated at approx. 390 degrees C. The temperature at which films are fabricated is very critical to produce inverted characteristics.

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