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Browse Prior Art Database

Alignment Apparatus

IP.com Disclosure Number: IPCOM000091624D
Original Publication Date: 1968-Apr-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 36K

Publishing Venue

IBM

Related People

Rottmann, HR: AUTHOR

Abstract

Apparatus is provided in a microscope to rapidly alternate two viewed images in order to detect the deviation in position of an object to be aligned with respect to a reference.

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Alignment Apparatus

Apparatus is provided in a microscope to rapidly alternate two viewed images in order to detect the deviation in position of an object to be aligned with respect to a reference.

The object to be aligned, e.g., a transparent disk having a pattern formed on it, is mounted on supports movable in the X, Y, and theta directions. A reference, which is a transparent disk bearing a pattern identical to that of the object, is supported in a position corresponding to the preselected orientation into which the object is to be aligned. Light from a pair of sources is transmitted respectively to the object and the reference through suitable condensing and filtering devices. A rotatable, opaque plate is disposed in the path of the light being transmitted respectively to the object and the reference. The plate has an opening formed in it so that as the plate is rotated through the respective paths of the transmitted light, light is transmitted through the rotating aperture alternately to the object and to the reference. The light passing through the object and the reference is then respectively transmitted through one of a pair of matched objective lenses and subsequently through a prism assembly which converges the light traveling along the two paths to a single path passing through an eye piece and then to the observer.

When the object is in alignment with respect to the reference, the images of the object and reference are superimposed on each other and a...