Browse Prior Art Database

Scanning Monolithic Photodetector

IP.com Disclosure Number: IPCOM000091629D
Original Publication Date: 1968-Apr-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 28K

Publishing Venue

IBM

Related People

Wilfinger, RJ: AUTHOR

Abstract

A monolithic integrated structure is used to provide both a photodetector and a scanning mechanism for optical scanning. The device includes a photosensitive detector attached to a mechanically resonant system. The resonant system provides periodic mechanical displacement which causes the photosensitive device to scan. The mechanical system preferably is a monocrystalline silicon cantilever 1 with phototransistor 2 diffused in such cantilever. The latter is excited to resonance by thermal driver 3 or other excitation device which is also diffused into cantilever 1. Support 4 bears one end of cantilever 1. Condensing lens 5 focuses the emitting light from the plane of the object 6 being scanned onto phototransistor 2.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Scanning Monolithic Photodetector

A monolithic integrated structure is used to provide both a photodetector and a scanning mechanism for optical scanning. The device includes a photosensitive detector attached to a mechanically resonant system. The resonant system provides periodic mechanical displacement which causes the photosensitive device to scan. The mechanical system preferably is a monocrystalline silicon cantilever 1 with phototransistor 2 diffused in such cantilever. The latter is excited to resonance by thermal driver 3 or other excitation device which is also diffused into cantilever 1. Support 4 bears one end of cantilever 1. Condensing lens 5 focuses the emitting light from the plane of the object 6 being scanned onto phototransistor 2. The effect of the vibration of cantilever 1 is illustrated by showing two positions, position 1 and position 2, of cantilever 1 and the resultant detection of the emitted light from different spots on object 6.

1

Page 2 of 2

2

[This page contains 1 picture or other non-text object]