Browse Prior Art Database

Electro Optic Registration System

IP.com Disclosure Number: IPCOM000091721D
Original Publication Date: 1968-Apr-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 36K

Publishing Venue

IBM

Related People

Kosanke, K: AUTHOR [+3]

Abstract

The system is for pattern registration, applicable to artwork generation for integrated circuits, step and repeat processes, precision measurements, etc. It uses electro-optical light deflection techniques. The system comprises reference plate 1 and working plate 2 mounted on common table 3 which can be moved in the X-Y directions. Plate 1 has marks which are individually illuminated by light source 17 and projected through detection aperture 14 of detection mask 4 disposed in front of photodetector 5.

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Electro Optic Registration System

The system is for pattern registration, applicable to artwork generation for integrated circuits, step and repeat processes, precision measurements, etc. It uses electro-optical light deflection techniques. The system comprises reference plate 1 and working plate 2 mounted on common table 3 which can be moved in the X-Y directions. Plate 1 has marks which are individually illuminated by light source 17 and projected through detection aperture 14 of detection mask 4 disposed in front of photodetector 5.

Electro-optic, digital light deflector 6 is placed in the path of reference beam
7. For registration, the image of the respective mark is moved by deflector 6 across mask 4 until it registers with aperture 14. In this position, registration is achieved and the master pattern is illuminated to expose plate 2. As deflector 6 is common to both light paths, beam 7 as well as beam 8 illuminating pattern mask 9, the position of the exposed pattern on plate 2 corresponds to the location of the mark on plate 1. After exposure, table 3 is moved to the position of the next reference mark. For fine adjustment, deflector 6 is stepped until the image of the registration mark registers with aperture 14 in mask 4.

To control this movement automatically, analog deflector 10 is provided for periodically displacing the image of the reference mark across aperture 14 of mask 4 in X and Y directions. For X-Y registration, the reference mark and apertur...