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Double Coating of Shipley Photoresist

IP.com Disclosure Number: IPCOM000091754D
Original Publication Date: 1968-May-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Reimer, AE: AUTHOR

Abstract

Photoresist coatings free of pinholes are prepared in the following manner. Shipley 340 photoresist is spun onto a substrate which has been heated to a temperature of 90 degrees C, at about 1,000 rpms. The deposited coating is then heated to a temperature of about 60 degrees C +/- 5 degrees C for 15 minutes. An image is formed on the coating by exposing the film to actinic radiation under a predetermined pattern for 45 seconds and developing for an additional 45 seconds. The developed image is then rinsed with FREON* followed by heating at a temperature of 90 degrees C for at least 90 minutes. A second photoresist coating is applied to the initial coating by the above spin-coating technique and is heated to a temperature of 60 degrees C for 15 minutes.

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Double Coating of Shipley Photoresist

Photoresist coatings free of pinholes are prepared in the following manner. Shipley 340 photoresist is spun onto a substrate which has been heated to a temperature of 90 degrees C, at about 1,000 rpms. The deposited coating is then heated to a temperature of about 60 degrees C +/- 5 degrees C for 15 minutes. An image is formed on the coating by exposing the film to actinic radiation under a predetermined pattern for 45 seconds and developing for an additional 45 seconds. The developed image is then rinsed with FREON* followed by heating at a temperature of 90 degrees C for at least 90 minutes. A second photoresist coating is applied to the initial coating by the above spin- coating technique and is heated to a temperature of 60 degrees C for 15 minutes. The coating is again exposed to actinic radiation, developed and rinsed with FREON, as stated above. The doubly coated substrate is free of pinholes and can be preferentially etched. *Trademark of E. I. du Pont de Nemours and Co.

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