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Electrolytic Vessel

IP.com Disclosure Number: IPCOM000091888D
Original Publication Date: 1968-Jun-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 44K

Publishing Venue

IBM

Related People

Mirbach, EC: AUTHOR

Abstract

The electrolytic vessel is for the anodic oxidation of silicon wafers. The vessel consists of a housing, threaded on top to receive a screw cover. An insulating layer and a brass block serving as a cathode are arranged inside the housing. The brass block is linked with a current connection through the housing and the insulation. The sample proper, which can take the form of a silicon wafer, is placed on the brass block. In order to ensure a perfect seal, the funnel is shaped as shown and, by the screw cover, is firmly pressed against the silicon wafer. The funnel, made of DELRIN*, remains unaffected by adverse temperatures and moisture and is resistant to solvents over long periods. The fact that the funnel is forced against the silicon wafer by a screw cover ensures that the funnel rests uniformly on the sample.

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Electrolytic Vessel

The electrolytic vessel is for the anodic oxidation of silicon wafers. The vessel consists of a housing, threaded on top to receive a screw cover. An insulating layer and a brass block serving as a cathode are arranged inside the housing. The brass block is linked with a current connection through the housing and the insulation. The sample proper, which can take the form of a silicon wafer, is placed on the brass block. In order to ensure a perfect seal, the funnel is shaped as shown and, by the screw cover, is firmly pressed against the silicon wafer. The funnel, made of DELRIN*, remains unaffected by adverse temperatures and moisture and is resistant to solvents over long periods. The fact that the funnel is forced against the silicon wafer by a screw cover ensures that the funnel rests uniformly on the sample. The electrolytic vessel has the advantage of eliminating the need for additional sealings between the funnel and the sample and of ensuring, through the pointed shape of the sealing surface, a highly uniform and durable seal. *Trademark of E. I. du Pont de Nemours and Co.

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