Browse Prior Art Database

Wafer Pickup with Air Barrier

IP.com Disclosure Number: IPCOM000091920D
Original Publication Date: 1968-Jul-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 40K

Publishing Venue

IBM

Related People

Hayunga, CP: AUTHOR

Abstract

This device for picking up wafers and similar small objects uses the Bernoulli principle. Pickup device 10 is provided with a flow of air through port 12. Portions 10' are attached to the main body of device 10 and form a conical annular exhaust port 14 As device 10 is brought gear wafer 20, a flow of air, shown by the arrows, is established, holding wafer 20 to device 10. Three wire locators 16 are attached 60 degrees apart from each other to 10'. This maintains wafer 20 in position. Almost all of the air exhausts through port 14, eliminating air flow between 10' and wafer 20, thus preventing adjacent wafers from being disturbed.

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Wafer Pickup with Air Barrier

This device for picking up wafers and similar small objects uses the Bernoulli principle. Pickup device 10 is provided with a flow of air through port 12. Portions 10' are attached to the main body of device 10 and form a conical annular exhaust port 14 As device 10 is brought gear wafer 20, a flow of air, shown by the arrows, is established, holding wafer 20 to device 10. Three wire locators 16 are attached 60 degrees apart from each other to 10'. This maintains wafer 20 in position. Almost all of the air exhausts through port 14, eliminating air flow between 10' and wafer 20, thus preventing adjacent wafers from being disturbed.

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