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Browse Prior Art Database

Pattern Generator

IP.com Disclosure Number: IPCOM000091923D
Original Publication Date: 1968-Jul-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 40K

Publishing Venue

IBM

Related People

Beatty, HJ: AUTHOR [+2]

Abstract

This system produces a pattern on a photosensitive surface by using an X-Y table with feedback control, a controlled aperture, and a fly's-eye lens.

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Pattern Generator

This system produces a pattern on a photosensitive surface by using an X-Y table with feedback control, a controlled aperture, and a fly's-eye lens.

X-Y table 10 is positioned under the control of feedback control circuit 11. Table 10 is mechanically positioned relative to a reference 12 to a high degree of accuracy through the use of lead screw and nut 14 and drive motor 16. Shaft encoder 18 insures a gross angular position of the lead screw which produces a gross addressable position of table 10. Vernier positioning of the table is accomplished through vernier adjustment 20 and optical grating system 22.

Aperture 24 is imaged on workpiece 26 by fly's-eye lens 28.

The number of images is equal to the number of lens segments. The image of aperture 24 exposes the photosensitive surface of workpiece 26 when light source 30 is flashed. A pattern of exposed areas is created on the surface of workpiece 26 by moving table 10 to desired locations and then activating light source 30. Since lens 28 creates a multiple the number and spacing depending on the design of lens 28. Thus, it is only necessary to generate a cell of the matrix of patterns, the rest of the cells of the matrix being generated simultaneously. Lens 28 is a matrix of lenses creating multiple images on workpiece 26. This system generates a pattern of exposed areas on a photosensitive surface in a relatively short time.

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