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Long Life Sputtering Cathode for Magnetic Film Deposition

IP.com Disclosure Number: IPCOM000091945D
Original Publication Date: 1968-Jul-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Bertelsen, BI: AUTHOR

Abstract

In the sputter deposition of magnetic films, it has been necessary to use thin sheet cathodes to avoid magnetic field distortion at the substrate. Such field distortion produces skew in magnetic films. Much thicker cathodes can be employed without producing field distortion by providing an array of raised squares on the cathode. Such squares operate to reduce the permeability of the cathode, resulting in less field distortion per unit mass of cathode.

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Long Life Sputtering Cathode for Magnetic Film Deposition

In the sputter deposition of magnetic films, it has been necessary to use thin sheet cathodes to avoid magnetic field distortion at the substrate. Such field distortion produces skew in magnetic films. Much thicker cathodes can be employed without producing field distortion by providing an array of raised squares on the cathode. Such squares operate to reduce the permeability of the cathode, resulting in less field distortion per unit mass of cathode.

In a specific example, 1/4 x 1/4 inch raised squares are provided by grooving the cathode at right angles to a depth of between 1/8 and 1/4 inch, with a groove width of from 10 to 20 mils.

The remaining ungrooved depth of the cathode is about 10 mils, which is a typical thickness for a flat thin sheet cathode. Sputtering of this cathode tends to level the surface, because the protruding material is removed at a much higher rate than is the material at the bottom of the grooves. However, the field distortion is never any greater than for a simple flat cathode having a thickness corresponding to the ungrooved portion of the disclosed cathode.

With this arrangement, there are produced sputtering cathodes for magnetic film deposition with much longer life, without introducing field distortion at the anode.

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