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Fly's Eye Lenses

IP.com Disclosure Number: IPCOM000091995D
Original Publication Date: 1968-Aug-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 33K

Publishing Venue

IBM

Related People

Quenot, J: AUTHOR

Abstract

A combination of two fly's eye lenses is used in series for projecting microminiaturized images on a photosensitive surface. Images obtained from a single object through the first fly's eye lens are employed as objects for transmission through the second fly's eye lens. Object 20 has a desired pattern drawn on it. This pattern is any configuration that is desired to be reproduced in great numbers. Light source 10 provides uniform light which passes through unmarked portions of object 20 to fly's eye lens 30. The latter has X number of elements providing X number of images of the pattern on object 20. Each of the X number of images is transmitted to fly's eye lens 40 which also has X number of elements. In this way, X/2/ numbers of images are projected onto photosensitive screen 50.

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Fly's Eye Lenses

A combination of two fly's eye lenses is used in series for projecting microminiaturized images on a photosensitive surface. Images obtained from a single object through the first fly's eye lens are employed as objects for transmission through the second fly's eye lens. Object 20 has a desired pattern drawn on it. This pattern is any configuration that is desired to be reproduced in great numbers. Light source 10 provides uniform light which passes through unmarked portions of object 20 to fly's eye lens 30. The latter has X number of elements providing X number of images of the pattern on object 20.

Each of the X number of images is transmitted to fly's eye lens 40 which also has X number of elements. In this way, X/2/ numbers of images are projected onto photosensitive screen 50. The latter, after developing, is useful as a mask in miniaturized element manufacturing of, e.g., semiconductor devices.

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