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Vacuum Pencil Tip for Handling Semiconductor Wafers

IP.com Disclosure Number: IPCOM000092309D
Original Publication Date: 1968-Nov-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 21K

Publishing Venue

IBM

Related People

Schmitz, DA: AUTHOR

Abstract

A vacuum pencil tip is arranged for holding a semiconductor wafer 10 by its edge 11. This minimizes damage to integrated circuits on the surface 12 of wafer 10. The vacuum pencil has handle 14 adapted to be hand held. Tip 16 of the pencil is attached to stem 18 extending from handle 14. Button 20 is used to open stem 18 to a vacuum system, thus drawing a vacuum through tip 16. The latter has groove 22 adapted to engage the edge 11 of wafer 10, with little or no clearance. The vacuum thus holds wafer 10 securely by tip 16 without touching any area of such wafer beyond line 26. Use of the vacuum pencil substantially reduces damage to semiconductor wafers during handling.

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Vacuum Pencil Tip for Handling Semiconductor Wafers

A vacuum pencil tip is arranged for holding a semiconductor wafer 10 by its edge 11. This minimizes damage to integrated circuits on the surface 12 of wafer 10. The vacuum pencil has handle 14 adapted to be hand held. Tip 16 of the pencil is attached to stem 18 extending from handle 14. Button 20 is used to open stem 18 to a vacuum system, thus drawing a vacuum through tip 16. The latter has groove 22 adapted to engage the edge 11 of wafer 10, with little or no clearance. The vacuum thus holds wafer 10 securely by tip 16 without touching any area of such wafer beyond line 26. Use of the vacuum pencil substantially reduces damage to semiconductor wafers during handling.

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